using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology and HMI single- and multi-beam technologies. These tools will be installed in imec’s state-of-the-art ...

using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology and HMI single- and multi-beam technologies. These tools will be installed in imec’s state-of-the-art ...

Additionally, imec will incorporate ASML's YieldStar optical metrology solutions and HMI’s single- and multi-beam inspection tools into its facilities. These tools will be installed in Imec's ...

The new ASML machines, which print features onto chips using beams of light, can also do the same work as earlier machines using fewer exposures, saving time and money. Carson said early results ...

focusing on developing high-end nodes using ASML systems, including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies. These tools ...