White light interferometry (WLI) and its variant, coherence scanning interferometry (CSI), are advanced optical techniques used for high-precision surface profiling and measurement. These methods ...

The subnanometre vertical resolution and high spatial resolution of scanning interferometry enable a highly detailed three-dimensional (3D) representation of the specimen under test. This 3D ...

For those delving deeper, distinguishing between techniques such as coherence scanning interferometry (CSI) and confocal microscopy is essential. CSI, or white light interferometry, excels in ...

and automation into one unique package that represents ZYGO's most advanced Coherence Scanning Interferometric (CSI) profiler. The entirely non-contact technology maximizes the return on investment by ...