Physics and technology of nanoscale photonic and electronic devices. Bulk crystal, thin film and epitaxial growth technologies. Semiconductor characterization techniques. Defects in crystals.

A breakthrough in next-generation semiconductor technology has been announced by Chinese researchers, with the creation of the world’s largest N-polar gallium nitride (GaN) wafer, at eight ...

This binary pattern is required for pattern transfer as the substrate's parts covered with resist are protected from etching, ion implantation ... layer deposited on a wafer is needed for certain ...

Our ion implantation technique using the stencil mask is expected to significantly reduce ... 5】GaAs/Si-based three-junction smart stack cell Apparatus that etches a single side of the wafer by spin ...