This 3D information can be used to obtain very accurate and repeatable height measurements for a step within a MEMS structure. The added advantage of a full 3D representation of the surface is the ...

Innovative inverted pyramid Hall-effect sensors offer improved accuracy and reduced crosstalk, paving the way for ...

MEMS (Micro-Electro-Mechanical Systems, MEMS) probe card with the optimized structure and is an ideal to support fine-pitch and high-pin count test requirements. The Virgo Prima MEMS micro-cantilever ...