Photolithography at a wavelength of 193 nm ... wafer are then etched and processed to form parts of the circuit. These steps are repeated 40 times or more to build up the complete three ...

This pattern can then guide further processes, such as etching or doping, to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate ...

Mithun Manikandan, Paolo Nicolini, and Prokop Hapala decided to combine the possibilities offered by DNA origami and photolithography ... work represents another step towards such a future.