Interestingly, DUV lithography at a wavelength of 193 nm ... 1 is a process factor determined by the exact details of the optical system. The figure of merit for the polarization quality of ...

As mentioned above, the mirrors in the projection optics only reflect 72% of the incident EUV radiation at best. A typical projection lens assembly for a lithography system will include six or ...

One of the deep ultraviolet (DUV) lithography machines operates at a wavelength of 193 nanometres (nm), with a resolution ...

This avoids the need for an optical system ... this new lithography method, which will be essential for widespread industry ...

The list of electronic special equipment includes deep ultraviolet (DUV) lithography equipment called "argon fluoride lithography machine," with core technical specifications of "300mm wafer ...

The VOYAGER is a high-performance electron beam lithography ... system together with smart features and original system architecture guaruntees the shortest time to result. This makes it perfect for ...