Used in photolithography. Aligns masks to existing structures on a wafer and exposes the photo-resist to transfer the mask design.

Photolithography uses light to transfer a pattern of features from a mask to a light-sensitive chemical photoresist on a semiconductor wafer. As the pattern is transferred, it is reduced in scale ...

This enhanced efficiency UVC microLED has showcased the viability of a lowered cost maskless photolithography through ... source with the pattern on the mask. It provides sufficient irradiation ...

Ultraviolet (UV) light is shone through the photomask, exposing the photoresist underneath except where the mask blocks the light ... to create the final microstructures. Photolithography offers high ...