A RECENT paper from this laboratory 1 described the embrittlement of tungsten wire if it be heated in atmospheres containing even traces of ammonia. This work has been extended and has revealed a ...

Tungsten-based ALD, first pioneered by Lam, has been the predominant metallization technique for deposition and void-free fill of contacts and lines for over two decades. However, to scale NAND ...

have optimized the front-side metallization of silicon heterojunction (SHJ) solar cells using very low silver laydown for multi-wire interconnection. “This approach is easy to implement as it ...