The Applied Mirra system for silicon, STI oxide, polysilicon, and tungsten applications integrates the post-CMP Mesa ® cleaner that effectively removes slurry, preventing residue formation and minimizing particles and water marks.

2021年8月24日 · 代表设备是应用材料的Mirra-mesa，其中垂直清洗是显著特征，也是应用材料的核心技术之一。 一方面可以获得更加洁净的晶圆，另一方面大幅度减少 ...

应用材料公司的 Mirra 系统可以用来抛光硅、 STI 氧化物、多晶硅和金属钨，它还集成了 Mesa 清洗器，可以有效清除研磨后的晶圆表面上附着的研磨液，阻止研磨液残留，从而最大限度地减少微粒和水印带来的产品缺陷。 为了处理具有挑战的工艺应用，比如大马士革铜 镶嵌 、 WLP 和 MEMS ，应用材料公司的 Mirra 系统还可以配置 Desica ™ 清洗器，它的晶圆干燥方法依据马拉古尼（Marangoni) ™ 效应：快速、高效且无水印。 应用材料公司的Mirra CMP系列推出一款新 …

2024年12月23日 · MIRRA MESA – provides fully automated Dry In-Dry Out (DIDO) processing and is integrated with the MESA cleaner. A FABS unit is added that can accommodate up to four 25-wafer cassettes. MIRRA DNS – integrated with the DNS AS-2000 Post-CMP cleaning tool and includes the FABS (Factory Automation Buffer Station) and an LTA (Linear Transfer ...

The Mirra was the first CMP system that successfully integrated endpoint detection and integrated cleaning. It was a latecomer among those several other entries that had been

2022年2月2日 · MIRRA MESA - provides fully automated Dry In-Dry Out (DIDO) processing and is integrated with the MESA cleaner. A FABS unit is added that can accommo-date up to four 25-wafer cassettes.

本機台Mirra Mesa為AMAT 美國應用材料公司所出產之8英吋化學機械研 磨機，其主要應用於前段STI或SOI或通道層(poly-Si/Oxide/Nitride)之平坦 化以作為有效隔離並應用於矽覆蓋絕緣技術。

AMAT Mirra Mesa CMP System – provides fully automated Dry In-Dry Out (DIDO) processing and is integrated with the MESA cleaner. A FABS unit is added that can accommodate up to four 25-wafer cassettes.

Mirra Mesa CMP system combines wafer polishing and cleaning capabilities on a single system for high-volume manufacturing

Entrepix offers a wide array of Applied Materials Mirra platform upgrades, including new and improved head rotation motors and drivers (pictured at right), pad conditioning and wafer handling improvements, coating services, sensing solutions for wafer slip and slurry flow, and our latest generation Entegrity head testing platform that suits all ...